Inventor
Frank B. M. Van Bilsen
Inventor
Phoenix, AZ, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1047%
C23CCoating metallic material32%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light16%
G01KMeasuring temperature5%
PatentTitleYear
7,655,093'Wafer support system'20106,703,592'System of controlling the temperature of a processing chamber'20046,507,007'System of controlling the temperature of a processing chamber'20036,491,757'Wafer support system'20026,454,866'Wafer support system'20026,343,183'Wafer support system'20026,325,858'Long life high temperature process chamber'20016,191,399'System of controlling the temperature of a processing chamber'20016,113,702'Wafer support system'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2010Patents assigned to ASM INC (9)· patent assignee history
2000–2010Based in Phoenix, AZ, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM INC | 9 | 2000–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Phoenix, AZ, US | 9 | 2000–2010 |