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Inventor

TOSHIYUKI NAKATSUBO

Inventor
JP

Overview

2→
Patents
2021–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material29%
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01JElectric discharge tubes or discharge lamps14%
PatentTitleYear
11,664,201Substrate holding mechanism and substrate processing apparatus202311,136,669Film formation apparatus2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021–2023Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2021Patents assigned to TOKYO ELECTRON LIMIIED (1)· patent assignee history
2021–2023Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22021–2023
TOKYO ELECTRON LIMIIED12021
Locations
LocationPatentsSpan
JP22021–2023