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Inventor

TOSHIYA SHIMADA

Inventor
JP

Overview

2→
Patents
2024–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices20%
H05HPlasma technique20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
12,505,989Substrate processing apparatus, and method of manufacturing semiconductor device202511,948,778Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024–2025Patents assigned to KOKUSAI ELECTRIC CORP (2)· patent assignee history
2024–2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KOKUSAI ELECTRIC CORP22024–2025
Locations
LocationPatentsSpan
JP22024–2025