Inventor
PETER PAUL HEMPENIUS
Inventor
NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps71%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
11,798,777Charged particle beam apparatus, and systems and methods for operating the apparatus202311,764,030Stage apparatus suitable for electron beam inspection apparatus202311,621,142Substrate positioning device and electron beam inspection tool202311,315,752E-beam apparatus202211,302,512Electron beam inspection apparatus stage positioning2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2023Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2022–2023Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 5 | 2022–2023 |