Inventor
Joseph R. ABEL
Inventor
US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material22%
H01LSemiconductor devices22%
H01JElectric discharge tubes or discharge lamps15%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
H05HPlasma technique4%
H10BElectronic memory devices4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
G05BControl or regulating systems in general2%
PatentTitleYear
12,598,930Conformal thermal CVD with controlled film properties and high deposition rate202612,473,633Plasma enhanced atomic layer deposition of silicon-containing films202512,431,349In-situ control of film properties during atomic layer deposition202512,417,943Reducing intralevel capacitance in semiconductor devices202512,412,742Impurity reduction in silicon-containing films202512,400,880Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber202512,322,619Dynamic process control in semiconductor manufacturing202512,288,685Modifying hydrophobicity of a wafer surface using an organosilicon precursor202512,252,782In-situ PECVD cap layer202512,125,705Method for providing doped silicon using a diffusion barrier layer202412,087,574Oxidative conversion in atomic layer deposition processes202412,020,923Low-k ALD gap-fill methods and material202411,651,963Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to LAM RES CORP (12)· patent assignee history
2023–2026Based in US· patent location history
2026Patents assigned to LAM RES CORPORATION (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 12 | 2023–2025 |
| LAM RES CORPORATION | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 13 | 2023–2026 |