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Inventor

En-Tien Tan

Inventor
Hsinchu, TW

Overview

4→
Patents
1998–2000
Patent span
Performing operations
Primary field (CPC B)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
B05CApparatus for applying fluent materials to surfaces, in general29%
B08BCleaning in general14%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices14%
PatentTitleYear
6,099,646'Dispensing system of a coater'20006,062,442'Dispense system of a photoresist coating machine'20006,048,399'SOG coater nozzle pot'20005,740,580'Stepper vacuum chuck wiper'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998–2000Patents assigned to UNITED MICROELECTRONICS CORP (4)· patent assignee history
1998–2000Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
UNITED MICROELECTRONICS CORP41998–2000
Locations
LocationPatentsSpan
Hsinchu, TW41998–2000