Inventor
SHOUQIAN SHAO
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
C23CCoating metallic material25%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling8%
H01LSemiconductor devices8%
H02NElectric machines not otherwise provided for8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
12,394,595Multi-antenna unit for large area inductively coupled plasma processing apparatus202512,080,516High density plasma enhanced process chamber202411,967,516Substrate support for chucking of mask for deposition processes202411,929,236Methods of tuning to improve plasma stability2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2025Patents assigned to APPLIED MATERIALS INC (4)· patent assignee history
2024–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 4 | 2024–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2024–2025 |