Inventor
Diane K. Stewart
Inventor
Ipswich, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties18%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
H01JElectric discharge tubes or discharge lamps18%
B82YSpecific uses or applications of nanostructures12%
G21GConversion of chemical elements12%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
H01LSemiconductor devices6%
H10NElectric solid-state devices not otherwise provided for6%
PatentTitleYear
10,410,828Charged particle beam system and methods20198,119,985'Methods and apparatus for statistical characterization of nano-particles'20127,727,681'Electron beam processing for mask repair'20107,662,524'Photolithography mask repair'20107,544,938'Methods and apparatus for statistical characterization of nano-particles'20097,504,182'Photolithography mask repair'20096,979,822'Charged particle beam system'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2012Patents assigned to FEI CO (6)· patent assignee history
2005–2019Based in Ipswich, MA, US· patent location history
2012Patents assigned to EPSZTEIN MICHEL (1)· patent assignee history
2012Patents assigned to ROSENTHAL DANIEL (1)· patent assignee history
2012Patents assigned to STEWART DIANE K (1)· patent assignee history
2019Patents assigned to CARL ZEISS MICROSCOPY LLC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FEI CO | 6 | 2005–2012 |
| CARL ZEISS MICROSCOPY LLC | 1 | 2019 |
| EPSZTEIN MICHEL | 1 | 2012 |
| ROSENTHAL DANIEL | 1 | 2012 |
| STEWART DIANE Kself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ipswich, Massachusetts, US | 7 | 2005–2019 |