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Inventor

Soichi Isobe

Inventor
Tokyo, JP

Overview

16→
Patents
1994–2020
Patent span
Performing operations
Primary field (CPC B)

Patents· 16 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing37%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices13%
B08BCleaning in general10%
G02BOptical elements, systems or apparatus10%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%
PatentTitleYear
10,688,622Substrate processing apparatus20209,842,732'Substrate cleaning apparatus and substrate cleaning method'20179,704,728'Substrate cleaning apparatus and substrate cleaning method'20179,144,881'Polishing apparatus and polishing method'20158,382,558'Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method'20138,298,369'Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid'20127,645,185'Substrate delivery mechanism'20107,160,180'Substrate delivery mechanism'20077,083,506'Polishing apparatus'20067,063,598'Substrate delivery mechanism'20066,783,445'Polishing apparatus'20046,783,427'Polishing system with air exhaust system'20046,746,312'Polishing method and polishing apparatus'20045,716,036'Mounting structure for mounting a polygon mirror'19985,598,291'Polygon mirror mounting structure'19975,373,391'Polygon mirror with embedded yoke'1994

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1994–2020Patents assigned to EBARA CORP (16)· patent assignee history
1994–2010Based in Kanagawa, JP· patent location history
2004–2020Based in Tokyo, JP· patent location history
2012–2013Patents assigned to ISOBE SOICHI (2)· patent assignee history
2012–2013Patents assigned to KOSUGE RYUICHI (2)· patent assignee history
2012Patents assigned to CKD CORP (1)· patent assignee history
2012Patents assigned to MAEDA KOJI (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP161994–2020
ISOBE SOICHIself22012–2013
KOSUGE RYUICHI22012–2013
CKD CORP12012
MAEDA KOJI12012
Locations
LocationPatentsSpan
Tokyo, JP92004–2020
Kanagawa, JP71994–2010