Inventor
Rudy Santo Tomas Cardema
Inventor
San Jose, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
C23CCoating metallic material31%
C30BSingle-crystal growth23%
G02BOptical elements, systems or apparatus8%
PatentTitleYear
7,977,258'Method and system for thermally processing a plurality of wafer-shaped objects'20117,949,237'Heating configuration for use in thermal processing chambers'20117,269,343'Heating configuration for use in thermal processing chambers'20076,970,644'Heating configuration for use in thermal processing chambers'20056,559,424'Windows used in thermal processing chambers'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2011Patents assigned to MATTSON TECH INC (5)· patent assignee history
2003–2011Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MATTSON TECH INC | 5 | 2003–2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 5 | 2003–2011 |