Inventor
Kenneth Lucchesi
Inventor
Newark, CA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps63%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices13%
PatentTitleYear
10,916,409Active control of radial etch uniformity202110,825,656Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring202010,615,003Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring202010,304,662Multi regime plasma wafer processing to increase directionality of ions201910,283,330Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators201910,115,564Uniformity control circuit for use within an impedance matching circuit201810,115,568Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring201810,002,746Multi regime plasma wafer processing to increase directionality of ions20189,852,889Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring20179,761,414'Uniformity control circuit for use within an impedance matching circuit'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to LAM RES CORP (10)· patent assignee history
2017–2021Based in Newark, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 10 | 2017–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Newark, California, US | 10 | 2017–2021 |