LexDanaLexDanabeta
Inventor

SERGEY OSHEMKOV

Inventor
IL

Overview

1→
Patents
2023
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
11,774,870Method for removing a particle from a mask system2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023Patents assigned to ZEISS CARL SMS LTD (1)· patent assignee history
2023Patents assigned to ZEISS CARL SMT GMBH (1)· patent assignee history
2023Based in IL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMS LTD12023
ZEISS CARL SMT GMBH12023
Locations
LocationPatentsSpan
IL12023