Inventor
Takaaki Shima
Inventor
Tokyo, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps100%
PatentTitleYear
10,170,283Focus ring for plasma processing apparatus2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019Patents assigned to COORSTEK KK (1)· patent assignee history
2019Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| COORSTEK KK | 1 | 2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 1 | 2019 |