Inventor
Mark E. Michaelian
Inventor
Lomita, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique100%
PatentTitleYear
6,973,164'Laser-produced plasma EUV light source with pre-pulse enhancement'20056,933,515'Laser-produced plasma EUV light source with isolated plasma'20056,912,267'Erosion reduction for EUV laser produced plasma target sources'20056,835,944'Low vapor pressure, low debris solid target for EUV production'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2005Patents assigned to UNIV CENTRAL FLORIDA RES FOUND (4)· patent assignee history
2004–2005Based in Torrance, CA, US· patent location history
2005Based in Lomita, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV CENTRAL FLORIDA RES FOUND | 4 | 2004–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Lomita, California, US | 2 | 2005 |
| Torrance, California, US | 2 | 2004–2005 |