Inventor
Eng Sheng PEH
Inventor
SG
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
B23KSoldering or unsoldering21%
H01JElectric discharge tubes or discharge lamps8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
H10DInorganic electric semiconductor devices4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
12,463,075Cathode assembly for integration of embedded electrostatic chuck (ESC)202512,437,999Methods and apparatus for mask patterning debris removal202512,068,159Methods and apparatus for mask patterning debris removal202411,721,583Mainframe-less wafer transfer platform with linear transfer system for wafer processing modules202311,600,492Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process202311,342,226Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process202211,302,549Substrate vacuum transport and storage apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (7)· patent assignee history
2022–2025Based in SG· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 7 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| SG | 7 | 2022–2025 |