Inventor
Isaac Millan
Inventor
Anaheim, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
F25Bprimary
F25BRefrigeration machines, plants or systems27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01JElectric discharge tubes or discharge lamps17%
H05HPlasma technique17%
Y02ATechnologies for adaptation to climate change10%
H01LSemiconductor devices3%
PatentTitleYear
8,980,044'Plasma reactor with a multiple zone thermal control feed forward control apparatus'20158,801,893'Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor'20148,546,267'Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal control'20138,337,660'Capacitively coupled plasma reactor having very agile wafer temperature control'20128,329,586'Method of processing a workpiece in a plasma reactor using feed forward thermal control'20128,221,580'Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loops'20128,092,639'Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changes'20127,988,872'Method of operating a capacitively coupled plasma reactor with dual temperature control loops'20117,765,820'Thermal control system and method'20107,415,835'Thermal control system and method'20087,178,353'Thermal control system and method'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2015Based in Anaheim, CA, US· patent location history
2012–2015Patents assigned to BERA KALLOL (7)· patent assignee history
2012–2015Patents assigned to BRILLHART PAUL LUKAS (7)· patent assignee history
2012–2015Patents assigned to BUCHBERGER JR DOUGLAS A (7)· patent assignee history
2012–2015Patents assigned to BURNS DOUGLAS H (7)· patent assignee history
2012–2015Patents assigned to COWANS KENNETH W (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BERA KALLOL | 7 | 2012–2015 |
| BRILLHART PAUL LUKAS | 7 | 2012–2015 |
| BUCHBERGER JR DOUGLAS A | 7 | 2012–2015 |
| BURNS DOUGLAS H | 7 | 2012–2015 |
| COWANS KENNETH W | 7 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Anaheim, California, US | 11 | 2007–2015 |