LexDanaLexDanabeta
Inventor

SAMANTHA TAN

Inventor
US

Overview

3→
Patents
2022–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01JElectric discharge tubes or discharge lamps18%
C23CCoating metallic material9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
PatentTitleYear
11,823,909Selective processing with etch residue-based inhibitors202311,450,513Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials202211,257,674Eliminating yield impact of stochastics in lithography2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to LAM RES CORP (3)· patent assignee history
2022–2023Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP32022–2023
Locations
LocationPatentsSpan
US32022–2023