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Inventor

Hiroshi Kagotani

Inventor
Kagoshima, JP

Overview

1→
Patents
2001
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
6,218,313'Process for producing semiconductor device, apparatus for optimizing film thickness, and process for optimizing film thickness'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to SONY CORP (1)· patent assignee history
2001Based in Kagoshima, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SONY CORP12001
Locations
LocationPatentsSpan
Kagoshima, JP12001