Inventor
Yaobo Yin
Inventor
Pleasanton, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
C23CCoating metallic material15%
H01JElectric discharge tubes or discharge lamps8%
PatentTitleYear
8,607,806'Megasonic precision cleaning of semiconductor process equipment components and parts'20138,327,861'Megasonic precision cleaning of semiconductor process equipment components and parts'20128,215,321'Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses'20127,942,973'Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses'20117,578,889'Methodology for cleaning of surface metal contamination from electrode assemblies'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2013Patents assigned to LAM RES CORP (5)· patent assignee history
2009–2013Based in Pleasanton, CA, US· patent location history
2012–2013Patents assigned to YIN YAOBO (3)· patent assignee history
2012–2013Patents assigned to JIANG LINDA TONG (2)· patent assignee history
2012Patents assigned to AUGUSTINO JASON (1)· patent assignee history
2012Patents assigned to AVOYAN ARMEN (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 5 | 2009–2013 |
| YIN YAOBOself | 3 | 2012–2013 |
| JIANG LINDA TONG | 2 | 2012–2013 |
| AUGUSTINO JASON | 1 | 2012 |
| AVOYAN ARMEN | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pleasanton, California, US | 5 | 2009–2013 |