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Inventor

Tatsuhiro Ueki

Inventor
Koshi, JP

Overview

1→
Patents
2019
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C03Cprimary
C03CChemical composition of glasses, glazes or vitreous enamels25%
C09KMaterials for miscellaneous applications, not provided for elsewhere25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
10,403,518Substrate processing method, substrate processing apparatus and recording medium2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2019Based in Koshi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12019
Locations
LocationPatentsSpan
Koshi, JP12019