Inventor
Yoshihiro Komeyama
Inventor
Yokohama, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling10%
B82YSpecific uses or applications of nanostructures10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
Y10TTechnical subjects covered by former us classification10%
PatentTitleYear
4,825,453'X-ray exposure apparatus'19894,777,641'Method and apparatus for alignment'19884,708,484'Projection alignment method and apparatus'19874,614,431'Alignment apparatus with optical length-varying optical system'19864,516,254'X-Ray lithographic apparatus'19854,492,356'Precision parallel translation system'1985Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1985–1989Patents assigned to HITACHI LTD (6)· patent assignee history
1985–1989Based in Yokohama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 6 | 1985–1989 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 6 | 1985–1989 |