Inventor
Rolf A. Guenther
Inventor
Monte Sereno, CA, US
Overview
Patents· 18 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material16%
Y10TTechnical subjects covered by former us classification11%
B81BMicrostructural devices or systems, e.g. micromechanical devices8%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems8%
H01JElectric discharge tubes or discharge lamps8%
B01DSeparation5%
B82YSpecific uses or applications of nanostructures5%
B29CShaping or joining of plastics3%
B64CAeroplanes3%
PatentTitleYear
8,267,386'Pneumatically actuated area vacuum gripper'20128,065,789'Method of fabricating a heated substrate support'20117,674,338'Heated substrate support and method of fabricating same'20107,354,501'Upper chamber for high density plasma CVD'20087,294,208'Apparatus for providing gas to a processing chamber'20077,074,298'High density plasma CVD chamber'20066,916,147'Substrate storage cassette with substrate alignment feature'20056,915,592'Method and apparatus for generating gas to a processing chamber'20056,902,947'Integrated method for release and passivation of MEMS structures'20056,900,133'Method of etching variable depth features in a crystalline substrate'20056,830,950'Integrated method for release and passivation of MEMS structures'20046,822,185'Temperature controlled dome-coil system for high power inductively coupled plasma systems'20046,367,410'Closed-loop dome thermal control apparatus for a semiconductor wafer processing system'20025,978,202'Electrostatic chuck having a thermal transfer regulator pad'19995,893,643'Apparatus for measuring pedestal temperature in a semiconductor wafer processing system'19995,851,926'Method for etching transistor gates using a hardmask'19984,701,231'Method of forming a joint between a tubular composite and a metal ring'19874,228,976'Main connector for an airfoil or wing'1980Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1980Based in Munich, DE· patent location history
1987–2011Based in Monte Sereno, CA, US· patent location history
1998–2011Patents assigned to APPLIED MATERIALS INC (15)· patent assignee history
2011Patents assigned to GUENTHER ROLF A (1)· patent assignee history
2011Patents assigned to HAMMILL CURTIS B (1)· patent assignee history
2012Patents assigned to EISELE THOMAS (1)· patent assignee history
2012Patents assigned to GUENTHER ROLF (1)· patent assignee history
2012Based in Glatten, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 15 | 1998–2011 |
| EISELE THOMAS | 1 | 2012 |
| GUENTHER ROLFself | 1 | 2012 |
| GUENTHER ROLF Aself | 1 | 2011 |
| HAMMILL CURTIS B | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Monte Sereno, California, US | 16 | 1987–2011 |
| Glatten, DE | 1 | 2012 |
| Munich, DE | 1 | 1980 |