Inventor
Eugene Joseph Karwacki, Jr.
Inventor
Orefield, PA, US
Overview
Patents· 38 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material19%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
Y10TTechnical subjects covered by former us classification5%
B01DSeparation4%
C01BNon-metallic elements4%
H01LSemiconductor devices3%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry2%
PatentTitleYear
9,447,287'Compositions and processes for depositing carbon-doped silicon-containing films'20169,293,361'Materials and methods of forming controlled void'20168,915,992'Process and system for providing acetylene'20148,906,455'Low temperature deposition of silicon-containing films'20148,846,522'Materials and methods of forming controlled void'20148,828,505'Plasma enhanced cyclic chemical vapor deposition of silicon-containing films'20148,795,411'Method for recovering high-value components from waste gas streams'20148,591,634'Method and equipment for selectively collecting process effluent'20138,535,414'Recovering of xenon by adsorption process'20138,399,349'Materials and methods of forming controlled void'20138,298,628'Low temperature deposition of silicon-containing films'20128,278,222'Selective etching and formation of xenon difluoride'20128,227,395'Process solutions containing surfactants'20128,129,577'Process and system for providing acetylene'20127,932,188'Mechanical enhancement of dense and porous organosilicate materials by UV exposure'20117,591,270'Process solutions containing surfactants'20097,581,549'Method for removing carbon-containing residues from a substrate'20097,521,405'Process solutions containing surfactants'20097,470,454'Non-thermal process for forming porous low dielectric constant films'20087,468,290'Mechanical enhancement of dense and porous organosilicate materials by UV exposure'20087,434,719'Addition of D2 to H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment'20087,404,990'Non-thermal process for forming porous low dielectric constant films'20087,371,688'Removal of transition metal ternary and/or quaternary barrier materials from a substrate'20087,357,138'Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials'20087,332,445'Porous low dielectric constant compositions and methods for making and using same'20087,285,154'Xenon recovery system'20077,267,842'Method for removing titanium dioxide deposits from a reactor'20077,129,199'Process solutions containing surfactants'20067,119,032'Method to protect internal components of semiconductor processing equipment using layered superlattice materials'20067,098,149'Mechanical enhancement of dense and porous organosilicate materials by UV exposure'20067,055,263'Method for cleaning deposition chambers for high dielectric constant materials'20066,857,433'Process for cleaning a glass-coating reactor using a reactive gas'20056,783,868'Halogen addition for improved adhesion of CVD copper to barrier'20046,686,594'On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring'20046,641,986'Acetylenic diol surfactant solutions and methods of using same'20036,509,266'Halogen addition for improved adhesion of CVD copper to barrier'20035,569,151'Handling and delivery system for dangerous gases'19965,019,208'Method for determining the depth of permeation of a modifier into the interior of a thermoplastic article'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–2016Patents assigned to AIR PROD & CHEM (38)· patent assignee history
1991–2016Based in Orefield, PA, US· patent location history
2012–2016Patents assigned to KARWACKI JR EUGENE JOSEPH (12)· patent assignee history
2012–2016Patents assigned to LEI XINJIAN (4)· patent assignee history
2012–2016Patents assigned to XIAO MANCHAO (4)· patent assignee history
2012–2016Patents assigned to HAN BING (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AIR PROD & CHEM | 38 | 1991–2016 |
| KARWACKI JR EUGENE JOSEPHself | 12 | 2012–2016 |
| LEI XINJIAN | 4 | 2012–2016 |
| XIAO MANCHAO | 4 | 2012–2016 |
| HAN BING | 3 | 2012–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Orefield, Pennsylvania, US | 38 | 1991–2016 |