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Inventor

Glen Travis

Inventor
Sunnyvale, CA, US

Overview

2→
Patents
2002–2003
Patent span
Performing operations
Primary field (CPC B)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
PatentTitleYear
6,616,772'Methods for wafer proximity cleaning and drying'20036,488,040'Capillary proximity heads for single wafer cleaning and drying'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002–2003Patents assigned to LAM RES CORP (2)· patent assignee history
2002–2003Based in Sunnyvale, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP22002–2003
Locations
LocationPatentsSpan
Sunnyvale, California, US22002–2003