Inventor
KEISUKE WASHIO
Inventor
JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material30%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01JElectric discharge tubes or discharge lamps10%
H05BElectric heating10%
H10KOrganic electric solid-state devices10%
PatentTitleYear
12,009,183Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus202411,453,944Atomic layer deposition apparatus and atomic layer deposition method202211,180,848Atomic layer deposition apparatus, film-forming method using atomic layer deposition apparatus, and cleaning method of atomic layer deposition apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to JAPAN STEEL WORKS LTD (3)· patent assignee history
2021–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| JAPAN STEEL WORKS LTD | 3 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 3 | 2021–2024 |