Inventor
Olkan Cuvalci
Inventor
Sunnyvale, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices23%
C23CCoating metallic material19%
H01JElectric discharge tubes or discharge lamps12%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding8%
H05BElectric heating8%
F27BFurnaces, kilns, ovens or retorts in general4%
PatentTitleYear
10,857,655Substrate support plate with improved lift pin sealing20209,916,994'Substrate support with multi-piece sealing surface'20189,837,250Hot wall reactor with cooled vacuum containment20179,783,889'Apparatus for variable substrate temperature control'20179,633,889'Substrate support with integrated vacuum and edge purge conduits'20179,543,186'Substrate support with controlled sealing gap'20179,490,150'Substrate support for substrate backside contamination control'20169,478,447'Substrate support with wire mesh plasma containment'20169,202,674'Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements'20158,920,564'Methods and apparatus for thermal based substrate processing with variable temperature capability'20148,618,446'Substrate support with substrate heater and symmetric RF return'20138,146,896'Chemical precursor ampoule for vapor deposition processes'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2020Patents assigned to APPLIED MATERIALS INC (12)· patent assignee history
2012–2017Patents assigned to CUVALCI OLKAN (6)· patent assignee history
2012–2017Patents assigned to YUAN XIAOXIONG (4)· patent assignee history
2012–2020Based in Sunnyvale, CA, US· patent location history
2013–2017Patents assigned to TZU GWO-CHUAN (4)· patent assignee history
2013–2016Patents assigned to CHANG YU (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 12 | 2012–2020 |
| CUVALCI OLKANself | 6 | 2012–2017 |
| TZU GWO-CHUAN | 4 | 2013–2017 |
| YUAN XIAOXIONG | 4 | 2012–2017 |
| CHANG YU | 3 | 2013–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 12 | 2012–2020 |