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Inventor

Elke Eckstein

Inventor
Paris, FR

Overview

1→
Patents
1997
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests50%
PatentTitleYear
5,670,018'Isotropic silicon etch process that is highly selective to tungsten'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997Patents assigned to IBM (1)· patent assignee history
1997Patents assigned to SIEMENS AG (1)· patent assignee history
1997Based in Paris, FR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
IBM11997
SIEMENS AG11997
Locations
LocationPatentsSpan
Paris, FR11997