Inventor
Alexander Vogler
Inventor
Aalen, DE
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
G02BOptical elements, systems or apparatus31%
F16CShafts8%
F16FSprings8%
H02KDynamo-electric machines8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
PatentTitleYear
10,571,816Assembly in a microlithographic projection exposure apparatus202010,303,065Arrangement for actuating at least one optical element in an optical system20199,887,613'Lithography device with eddy-current brake'20189,665,011'Arrangement for actuating at least one optical element in an optical system'20179,513,452'Damping device'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to ZEISS CARL SMT GMBH (5)· patent assignee history
2016Patents assigned to BRYDON ALAN L (1)· patent assignee history
2016Patents assigned to FROMMEYER ANDREAS (1)· patent assignee history
2016Patents assigned to RIEF KLAUS (1)· patent assignee history
2016Patents assigned to VOGLER ALEXANDER (1)· patent assignee history
2016–2020Based in Aalen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 5 | 2016–2020 |
| BRYDON ALAN L | 1 | 2016 |
| FROMMEYER ANDREAS | 1 | 2016 |
| RIEF KLAUS | 1 | 2016 |
| VOGLER ALEXANDERself | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 5 | 2016–2020 |