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Inventor

TOSHIYUKI ARAKANE

Inventor
JP

Overview

2→
Patents
2022–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling14%
C23CCoating metallic material14%
H01LSemiconductor devices14%
H02NElectric machines not otherwise provided for14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
11,658,012Control method and plasma processing apparatus202311,462,431Discharging method and substrate processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2022–2023Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22022–2023
Locations
LocationPatentsSpan
JP22022–2023