Inventor
TAKASHI DOKAN
Inventor
JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01LSemiconductor devices24%
H05HPlasma technique16%
B08BCleaning in general3%
C23CCoating metallic material3%
PatentTitleYear
12,537,172Plasma processing method and plasma processing apparatus202612,198,962Maintenance device, vacuum processing system, and maintenance method202512,165,842Control method and plasma processing apparatus202411,871,503Plasma processing method and plasma processing apparatus202411,764,082Control method and plasma processing apparatus202311,742,181Control method and plasma processing apparatus202311,742,182Control method and plasma processing apparatus202311,476,089Control method and plasma processing apparatus202211,337,297Plasma processing method and plasma processing apparatus202211,282,701Plasma processing method and plasma processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 10 | 2022–2026 |