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Inventor

Feng-Yeu Shau

Inventor
Anding Township, TW

Overview

2→
Patents
2000–2001
Patent span
Performing operations
Primary field (CPC B)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing50%
B01DSeparation25%
B03CMagnetic or electrostatic separation of solid materials from solid materials or fluids25%
PatentTitleYear
6,238,279'Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafers'20016,153,116'Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000–2001Patents assigned to MOSEL VITELIC INC (2)· patent assignee history
2000–2001Patents assigned to PROMOS TECHNOLOGIES INC (2)· patent assignee history
2000Patents assigned to SIEMENS AG (1)· patent assignee history
2000Based in Tainan, TW· patent location history
2001Patents assigned to INFINEON TECHNOLOGIES AG (1)· patent assignee history
2001Based in Anding Township, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
MOSEL VITELIC INC22000–2001
PROMOS TECHNOLOGIES INC22000–2001
INFINEON TECHNOLOGIES AG12001
SIEMENS AG12000
Locations
LocationPatentsSpan
Anding Township, TW12001
Tainan, TW12000