Inventor
Tooru Ueno
Inventor
Shunan-shi, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1063%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests38%
PatentTitleYear
8,033,770'Vacuum processing apparatus'20117,862,289'Vacuum processing apparatus and vacuum processing method'20117,476,073'Vacuum processing method'20096,920,369'Methods of operating vacuum processing equipment and methods of processing wafers'20056,795,745'Methods of operating vacuum processing equipment and methods of processing wafers'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2005Patents assigned to HITACHI LTD (2)· patent assignee history
2004–2005Based in Kumage-gun, JP· patent location history
2009–2011Patents assigned to HITACHI HIGH TECH CORP (3)· patent assignee history
2009–2011Based in Shunan-shi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 3 | 2009–2011 |
| HITACHI LTD | 2 | 2004–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shunan-shi, JP | 3 | 2009–2011 |
| Kumage-gun, JP | 2 | 2004–2005 |