Inventor
Keisuke Shinagawa
Inventor
Kawasaki, JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1048%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H01JElectric discharge tubes or discharge lamps12%
C23CCoating metallic material8%
H05HPlasma technique4%
PatentTitleYear
6,115,538'Steam supplying apparatus and method for controlling same'20005,998,104'Method of stripping a resist mask'19995,961,775'Apparatus for removing organic resist from semiconductor'19995,832,177'Method for controlling apparatus for supplying steam for ashing process'19985,773,201'Method of stripping a resist mask'19985,681,780'Manufacture of semiconductor device with ashing and etching'19975,628,871'Method of removing resist mask and a method of manufacturing semiconductor device'19975,478,403'Process and apparatus for ashing treatment'19955,397,432'Method for producing semiconductor integrated circuits and apparatus used in such method'19955,057,187'Ashing method for removing an organic film on a substance of a semiconductor device under fabrication'19914,983,254'Processing for stripping organic material'19914,961,820'Ashing method for removing an organic film on a substance of a semiconductor device under fabrication'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990–2000Patents assigned to FUJITSU LTD (12)· patent assignee history
1990–2000Based in Kawasaki, JP· patent location history
1998–2000Patents assigned to SHINKO SEIKI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FUJITSU LTD | 12 | 1990–2000 |
| SHINKO SEIKI | 2 | 1998–2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kawasaki, JP | 12 | 1990–2000 |