LexDanaLexDanabeta
Inventor

Michiaki Saito

Inventor
Ohmiya, JP

Overview

1→
Patents
2003
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,542,222'Beam output control method, beam output apparatus and exposure system, and device manufacturing method using the exposure system'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to NIKON CORP (1)· patent assignee history
2003Based in Ohmiya, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP12003
Locations
LocationPatentsSpan
Ohmiya, JP12003