Inventor
EUI SANG LIM
Inventor
KR
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01LSemiconductor devices29%
F26BDrying solid materials or objects by removing liquid therefrom14%
B08BCleaning in general11%
H01JElectric discharge tubes or discharge lamps7%
B25JManipulators4%
F17DPipe-line systems4%
PatentTitleYear
12,506,018Apparatus and method for treating substrate202512,431,347Method for treating substrate202512,334,330Substrate treating apparatus202512,293,928Apparatus and method for treating substrate202512,222,159Apparatus and method for treating substrate202512,014,938Apparatus and method for processing substrate202411,942,337Apparatus and method for treating substrate202411,495,474Apparatus and method for processing substrate202211,145,520Method for treating substrate involving supplying treatment liquid to peripheral area of substrate by second nozzle2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to SEMES CO LTD (9)· patent assignee history
2021–2025Based in KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMES CO LTD | 9 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| KR | 9 | 2021–2025 |