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Inventor

Mitsuhiko Inaba

Inventor
Tokyo, JP

Overview

3→
Patents
2020
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
B08BCleaning in general10%
B24BMachines, devices, or processes for grinding or polishing10%
B25JManipulators10%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors10%
PatentTitleYear
10,818,531Substrate transport system, substrate processing apparatus, hand position adjustment method202010,688,622Substrate processing apparatus202010,573,509Cleaning apparatus and substrate processing apparatus2020

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2020Patents assigned to EBARA CORP (3)· patent assignee history
2020Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP32020
Locations
LocationPatentsSpan
Tokyo, JP32020