Inventor
Caizhong Tian
Inventor
Amagasaki, JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps34%
H05HPlasma technique24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
C23CCoating metallic material10%
Y10TTechnical subjects covered by former us classification7%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form3%
F04DNon-positive-displacement pumps3%
PatentTitleYear
9,277,637'Apparatus for plasma treatment and method for plasma treatment'20169,048,070'Dielectric window for plasma treatment device, and plasma treatment device'20158,967,080'Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method'20158,925,351'Manufacturing method of top plate of plasma processing apparatus'20158,480,848'Plasma processing apparatus'20138,387,560'Plasma processing unit'20138,343,308'Ceiling plate and plasma process apparatus'20138,273,210'Plasma processing apparatus and method for adjusting plasma density distribution'20127,895,971'Microwave plasma processing apparatus'20117,396,431'Plasma processing system for treating a substrate'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2016Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2008–2016Based in Osaka, JP· patent location history
2011–2015Based in Amagasaki, JP· patent location history
2012–2016Patents assigned to NOZAWA TOSHIHISA (6)· patent assignee history
2012–2016Patents assigned to TIAN CAIZHONG (6)· patent assignee history
2012–2015Patents assigned to ISHIBASHI KIYOTAKA (4)· patent assignee history
2013Patents assigned to NISHIZUKA TETSUYA (2)· patent assignee history
2013Based in Tokyo, JP· patent location history
2015Based in Hyogo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2008–2016 |
| NOZAWA TOSHIHISA | 6 | 2012–2016 |
| TIAN CAIZHONGself | 6 | 2012–2016 |
| ISHIBASHI KIYOTAKA | 4 | 2012–2015 |
| NISHIZUKA TETSUYA | 2 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Amagasaki, JP | 5 | 2011–2015 |
| Osaka, JP | 3 | 2008–2016 |
| Hyogo, JP | 1 | 2015 |
| Tokyo, JP | 1 | 2013 |