Inventor
Pekka Soininen
Inventor
Helsinki, FI
Overview
Patents· 40 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material34%
C30BSingle-crystal growth16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
Y10TTechnical subjects covered by former us classification5%
H04WWireless communication networks4%
H01LSemiconductor devices3%
H04BTransmission3%
A44CPersonal adornments, e.g. jewellery1%
PatentTitleYear
11,041,243Coating precursor nozzle and a nozzle head202110,590,536Apparatus, method and reaction chamber202010,385,450Method of coating a substrate and an apparatus201910,280,508Nozzle head and apparatus for coating substrate surface201910,167,551Apparatus, method and reaction chamber201910,023,957Apparatus and method for processing substrate20189,909,212'Apparatus for processing substrate surface'20189,803,281'Nozzle head and apparatus'20179,783,887'Apparatus and method'20179,708,710'Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors'20179,683,291'Apparatus for processing surface of substrate and nozzle head'20178,883,258'Protective coating of silver'20148,496,753'Arrangement in connection with ALD reactor'20138,475,760'Device and method for producing nanotubes'20137,971,861'Safe liquid source containers'20117,922,821'Source, an arrangement for installing a source, and a method for installing and removing a source'20117,833,352'Apparatus for fabrication of thin films'20107,497,420'Safe liquid source containers'20097,276,774'Trench isolation structures for integrated circuits'20077,215,658'Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network'20077,156,380'Safe liquid source containers'20077,037,372'Method of growing a thin film onto a substrate'20067,018,478'Method of growing a thin film onto a substrate'20066,881,263'Method of growing a thin film onto a substrate'20056,861,334'Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition'20056,783,590'Method of growing a thin film onto a substrate'20046,759,325'Sealing porous structures'20046,699,783'Method for controlling conformality with alternating layer deposition'20046,694,141'Channel selection in a radio link system'20046,689,210'Apparatus for growing thin films'20046,686,271'Protective layers prior to alternating layer deposition'20046,630,030'Method and apparatus for growing thin films'20036,625,138'Data transmission method and a radio system'20036,594,248'Data transmission method and a radio system'20036,579,374'Apparatus for fabrication of thin films'20036,562,140'Apparatus for fabrication of thin films'20036,482,733'Protective layers prior to alternating layer deposition'20026,447,607'Apparatus for growing thin films'20025,855,680'Apparatus for growing thin films'19995,711,811'Method and equipment for growing thin films'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2020Based in Helsinki, FI· patent location history
2002–2005Patents assigned to ASM MICROCHEMISTRY OY (7)· patent assignee history
2003–2007Patents assigned to NOKIA CORP (3)· patent assignee history
2004–2011Patents assigned to ASM INT (11)· patent assignee history
2011–2021Patents assigned to BENEQ OY (15)· patent assignee history
2013–2019Patents assigned to SOININEN PEKKA (7)· patent assignee history
2019–2021Based in Espoo, FI· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BENEQ OY | 15 | 2011–2021 |
| ASM INT | 11 | 2004–2011 |
| ASM MICROCHEMISTRY OY | 7 | 2002–2005 |
| SOININEN PEKKAself | 7 | 2013–2019 |
| NOKIA CORP | 3 | 2003–2007 |
Locations
| Location | Patents | Span |
|---|---|---|
| Helsinki, FI | 37 | 1998–2020 |
| Espoo, FI | 3 | 2019–2021 |