Inventor
Mitsuhiro Tachibana
Inventor
Yamanashi, JP
Overview
Patents· 31 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material20%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
H01LSemiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry5%
B01LChemical or physical laboratory apparatus for general use5%
Y10TTechnical subjects covered by former us classification5%
C12QMeasuring or testing processes involving enzymes, nucleic acids or microorganisms4%
C40BCombinatorial chemistry4%
PatentTitleYear
10,903,083Substrate processing method, substrate processing apparatus and substrate processing system202110,460,946Naturally oxidized film removing method and naturally oxidized film removing device20199,991,138Etching method and etching apparatus20189,583,312'Film formation device, substrate processing device, and film formation method'20179,136,156'Substrate processing apparatus and film deposition apparatus'20159,111,747'Film deposition apparatus, substrate processing apparatus and film deposition method'20158,895,456'Method of depositing a film'20147,592,256'Method of forming tungsten film'20097,135,331'Apparatus for detecting biopolymers and cartridge'20067,063,871'CVD process capable of reducing incubation time'20066,924,223'Method of forming a metal layer using an intermittent precursor gas flow process'20056,913,996'Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring'20056,875,603'Apparatus for detecting biopolymers and cartridge'20056,835,352'Spotting pin'20046,790,651'Hybridization reaction apparatus and hybridization method'20046,787,349'Biochip reader and labeling reagent'20046,767,748'Spotting pin, spotting device and method for spotting biomolecules'20046,737,666'Apparatus and method for detecting an end point of a cleaning process'20046,726,883'Spotting pin'20046,660,101'Method and apparatus for cleaning film deposition device'20036,646,271'Method and apparatus for reading fluorescence'20036,582,954'Biopolymer detector'20036,465,347'Tungsten film forming method'20026,399,484'Semiconductor device fabricating method and system for carrying out the same'20026,346,425'Vapor-phase processing method capable of eliminating particle formation'20026,331,483'Method of film-forming of tungsten'20016,036,782'Shower head'20005,997,651'Heat treatment apparatus'19995,972,114'Film deposition apparatus with anti-adhesion film and chamber cooling means'19995,578,756'Method and apparatus for evaluating soundness of block-like structures'19965,303,671'System for continuously washing and film-forming a semiconductor wafer'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994–2021Patents assigned to TOKYO ELECTRON LTD (20)· patent assignee history
1994–2018Based in Yamanashi, JP· patent location history
2002–2021Based in Nirasaki, JP· patent location history
2003–2006Patents assigned to HITACHI SOFTWARE ENG (9)· patent assignee history
2003–2006Based in Kanagawa, JP· patent location history
2004Based in Tokyo, JP· patent location history
2014–2017Based in Iwate, JP· patent location history
2015Patents assigned to ENOMOTO TADASHI (1)· patent assignee history
2015Patents assigned to FURUYA HARUHIKO (1)· patent assignee history
2018–2019Patents assigned to CENTRAL GLASS CO LTD (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 20 | 1994–2021 |
| HITACHI SOFTWARE ENG | 9 | 2003–2006 |
| CENTRAL GLASS CO LTD | 2 | 2018–2019 |
| ENOMOTO TADASHI | 1 | 2015 |
| FURUYA HARUHIKO | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yamanashi, JP | 10 | 1994–2018 |
| Kanagawa, JP | 6 | 2003–2006 |
| Nirasaki, JP | 5 | 2002–2021 |
| Iwate, JP | 4 | 2014–2017 |
| Tokyo, JP | 3 | 2004 |