Inventor
SHINGO TOGASHI
Inventor
JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices17%
LOC137%
B29CShaping or joining of plastics3%
PatentTitleYear
12,358,096Rubber membrane having first and second hardness for use in a polishing head202512,183,642Film-thickness measuring method, method of detecting notch portion, and polishing apparatus202412,128,523Polishing apparatus202412,068,189Elastic membrane, substrate holding device, and polishing apparatus202411,958,163Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane2024D1021832Elastic membrane202411,745,306Polishing apparatus and method of controlling inclination of stationary ring202311,731,235Polishing apparatus and polishing method2023D0989012Elastic membrane202311,654,524Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus202311,548,113Method and apparatus for polishing a substrate202311,478,895Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device202211,472,001Elastic membrane and substrate holding apparatus202211,179,823Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to EBARA CORP (14)· patent assignee history
2021–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 14 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 14 | 2021–2025 |