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Inventor

Theo Panagopoulos

Inventor
San Jose, CA, US

Overview

7→
Patents
2012–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 7 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C23CCoating metallic material19%
H01LSemiconductor devices14%
PatentTitleYear
10,665,435Chamber with vertical support stem for symmetric conductance and RF delivery202010,395,902Chamber with vertical support stem for symmetric conductance and RF delivery201910,049,862Chamber with vertical support stem for symmetric conductance and RF delivery20189,953,843Chamber for patterning non-volatile metals20189,679,751'Chamber filler kit for plasma etch chamber useful for fast gas switching'20179,011,631'Rapid and uniform gas switching for a plasma etch process'20158,133,349'Rapid and uniform gas switching for a plasma etch process'2012

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2012–2020Patents assigned to LAM RES CORP (7)· patent assignee history
2012–2017Patents assigned to PANAGOPOULOS THEO (3)· patent assignee history
2012–2019Based in San Jose, CA, US· patent location history
2017Patents assigned to BLAIR CRAIG (1)· patent assignee history
2017Patents assigned to MCCHESNEY JON (1)· patent assignee history
2017Patents assigned to PATERSON ALEX (1)· patent assignee history
2020Based in Los Gatos, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP72012–2020
PANAGOPOULOS THEOself32012–2017
BLAIR CRAIG12017
MCCHESNEY JON12017
PATERSON ALEX12017
Locations
LocationPatentsSpan
San Jose, California, US62012–2019
Los Gatos, California, US12020