Inventor
Zhe GUI
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices20%
H10DInorganic electric semiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
H01JElectric discharge tubes or discharge lamps9%
B05CApparatus for applying fluent materials to surfaces, in general7%
PatentTitleYear
12,359,311Conformal deposition of silicon carbide films using heterogeneous precursor interaction202512,334,332Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors202512,331,402Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202512,272,547Conformal deposition of silicon carbide films202512,116,669Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202412,000,047Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202411,894,227Conformal deposition of silicon carbide films202411,702,748Wafer level uniformity control in remote plasma film deposition202311,608,559Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202311,264,234Conformal deposition of silicon carbide films2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2022–2025Based in US· patent location history
2023–2025Patents assigned to LAM RES CORP (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 2023–2025 |
| NOVELLUS SYSTEMS INC | 3 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2025 |