Inventor
Emily E. Fisch
Inventor
Burlington, VT, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
Y10Sprimary
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests24%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
B08BCleaning in general6%
B82YSpecific uses or applications of nanostructures6%
G01BMeasuring length, thickness or similar linear dimensions6%
G01HMeasurement of mechanical vibrations or ultrasonic, sonic or infrasonic waves6%
G10KSound-producing devices6%
H01JElectric discharge tubes or discharge lamps6%
H10BElectronic memory devices6%
PatentTitleYear
7,332,054'Etch apparatus'20086,777,137'EUVL mask structure and method of formation'20046,699,400'Etch process and apparatus therefor'20046,683,306'Array foreshortening measurement using a critical dimension scanning electron microscope'20046,577,406'Structure for lithographic focus control features'20036,372,573'Self-aligned trench capacitor capping process for high density DRAM cells'20026,282,459'Structure and method for detection of physical interference during transport of an article'20016,276,370'Sonic cleaning with an interference signal'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2008Patents assigned to IBM (6)· patent assignee history
2001–2008Based in Burlington, VT, US· patent location history
2002Patents assigned to TOSHIBA KK (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 6 | 2001–2008 |
| TOSHIBA KK | 1 | 2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Burlington, VT, US | 8 | 2001–2008 |