Inventor
Nobunori Abe
Inventor
Kanagawa, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
C08FMacromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds10%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests10%
PatentTitleYear
10,626,205Method for producing copolymer20206,309,795'Resist composition'20016,010,826'Resist composition'20005,773,190'Resist composition'19985,707,784'Method of forming chemically amplified resist pattern and manufacturing for semiconductor device by using the chemically amplified resist pattern'19985,688,628'Resist composition'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2001Patents assigned to NIPPON ZEON CO (5)· patent assignee history
1997–1998Patents assigned to FUJITSU LTD (2)· patent assignee history
1997–2001Based in Kanagawa, JP· patent location history
1998–2020Based in Tokyo, JP· patent location history
1998Based in Yokohama, JP· patent location history
2020Patents assigned to ZEON CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIPPON ZEON CO | 5 | 1997–2001 |
| FUJITSU LTD | 2 | 1997–1998 |
| ZEON CORP | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kanagawa, JP | 3 | 1997–2001 |
| Tokyo, JP | 2 | 1998–2020 |
| Yokohama, JP | 1 | 1998 |