LexDanaLexDanabeta
Inventor

JINMEI YANG

Inventor
CN

Overview

2→
Patents
2023–2024
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
C25FProcesses for the electrolytic removal of materials from objects13%
G01BMeasuring length, thickness or similar linear dimensions13%
G01CMeasuring distances, levels or bearings13%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
12,142,456Self-differential confocal tilt sensor for measuring level variation in charged particle beam system202411,581,161Systems and methods for etching a substrate2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2024Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2023–2024Based in CN· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22023–2024
Locations
LocationPatentsSpan
CN22023–2024