Inventor
Chin-Wang Hu
Inventor
Jubei, TW
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
6,841,311'Cleaning process for phase shift masks'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2005Based in Jubei, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Jubei, TW | 1 | 2005 |