Inventor
SIMON PHILIP SPENCER HASTINGS
Inventor
US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
G05BControl or regulating systems in general20%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
G06FElectric digital data processing5%
G06NComputing arrangements based on specific computational models5%
H01JElectric discharge tubes or discharge lamps5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
12,169,366Voltage contrast metrology mark202412,055,904Method to predict yield of a device manufacturing process202412,044,980Method of manufacturing devices202411,947,266Method for controlling a manufacturing process and associated apparatuses202411,803,127Method for determining root cause affecting yield in a semiconductor manufacturing process202311,754,931Method for determining corrections for lithographic apparatus202311,714,357Method to predict yield of a device manufacturing process202311,281,110Methods using fingerprint and evolution analysis2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to ASML NETHERLANDS BV (8)· patent assignee history
2022–2024Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 8 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 8 | 2022–2024 |