LexDanaLexDanabeta
Inventor

KWANG NAM KIM

Inventor
KR

Overview

3→
Patents
2022–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
H01JElectric discharge tubes or discharge lamps29%
H01LSemiconductor devices29%
PatentTitleYear
11,837,496Substrate processing apparatus and method of processing a substrate202311,501,987Loadlock module and semiconductor manufacturing apparatus including the same202211,289,309Device for providing gas to a plasma chamber and a plasma processing device including the same2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to SAMSUNG ELECTRONICS CO LTD (3)· patent assignee history
2022–2023Based in KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SAMSUNG ELECTRONICS CO LTD32022–2023
Locations
LocationPatentsSpan
KR32022–2023