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Inventor

Daniel Zschaebitz

Inventor
Dresden, DE

Overview

2→
Patents
2014–2019
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
G05BControl or regulating systems in general33%
Y02PClimate change mitigation technologies in the production or processing of goods33%
PatentTitleYear
10,481,592Selecting manufacturing settings based on historical data from manufacturing tools20198,660,681'Method and system for excursion monitoring in optical lithography processes in micro device fabrication'2014

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2014–2019Patents assigned to GLOBALFOUNDRIES INC (2)· patent assignee history
2014Patents assigned to POOCK ANDRE (1)· patent assignee history
2014Patents assigned to SCHOLTZ HEIKE (1)· patent assignee history
2014Patents assigned to ZSCHAEBITZ DANIEL (1)· patent assignee history
2014–2019Based in Dresden, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GLOBALFOUNDRIES INC22014–2019
POOCK ANDRE12014
SCHOLTZ HEIKE12014
ZSCHAEBITZ DANIELself12014
Locations
LocationPatentsSpan
Dresden, DE22014–2019