Inventor
Earl Jensen
Inventor
Santa Clara, CA, US
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
G01KMeasuring temperature15%
H01LSemiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light10%
G01RMeasuring electric variables5%
H01JElectric discharge tubes or discharge lamps5%
E21BEarth or rock drilling3%
G01BMeasuring length, thickness or similar linear dimensions3%
G05BControl or regulating systems in general3%
PatentTitleYear
10,777,393Process condition sensing device and method for plasma chamber202010,460,966Encapsulated instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications201910,215,626Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line20199,964,440Wafer level spectrometer20189,823,121'Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line'20179,719,867'Method and system for measuring heat flux'20179,620,400'Position sensitive substrate device'20179,360,302'Film thickness monitor'20169,356,822'Automated interface apparatus and method for use in semiconductor wafer handling systems'20169,304,160'Defect inspection apparatus, system, and method'20169,305,753'Thickness change monitor wafer for in situ film thickness monitoring'20169,222,842'High temperature sensor wafer for in-situ measurements in active plasma'20159,140,604'Wafer level spectrometer'20159,134,186'Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces'20158,889,021'Process condition sensing device and method for plasma chamber'20147,855,549'Integrated process condition sensing wafer and data analysis system'20107,555,948'Process condition measuring device with shielding'20097,540,188'Process condition measuring device with shielding'20097,151,366'Integrated process condition sensing wafer and data analysis system'20067,149,643'Integrated process condition sensing wafer and data analysis system'20067,135,852'Integrated process condition sensing wafer and data analysis system'20066,729,394'Method of producing a communicating horizontal well network'20046,010,538'In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link'20005,897,610'Electro optical board assembly for measuring the temperature of an object surface from infra red emissions thereof including an automatic gain control therefore'19995,771,973'Single well vapor extraction process'19985,717,608'Electro-optical board assembly for measuring the temperature of an object surface from infra-red emissions thereof, including an automatic gain control therefore'19985,600,147'Temperature measuring system having improved signal processing and multiple optical sensors'19975,470,155'Apparatus and method for measuring temperatures at a plurality of locations using luminescent-type temperature sensors which are excited in a time sequence'19955,351,268'Modular luminescence-based measuring system using fast digital signal processing'19945,107,445'Modular luminescence-based measuring system using fast digital signal processing'19924,926,227'Sensor devices with internal packaged coolers'19904,604,020'Integrated circuit wafer handling system'1986Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–2010Based in San Jose, CA, US· patent location history
1992–2000Patents assigned to LUXTRON CORP (7)· patent assignee history
1992–2000Based in Sunnyvale, CA, US· patent location history
1998–2004Based in Calgary, CA· patent location history
2010–2020Patents assigned to KLA TENCOR CORP (16)· patent assignee history
2014–2016Patents assigned to JENSEN EARL (7)· patent assignee history
2014–2016Patents assigned to SUN MEI (5)· patent assignee history
2014–2020Based in Santa Clara, CA, US· patent location history
2015–2016Patents assigned to QULI FARHAT (3)· patent assignee history
2017–2019Based in Milpitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 16 | 2010–2020 |
| JENSEN EARLself | 7 | 2014–2016 |
| LUXTRON CORP | 7 | 1992–2000 |
| SUN MEI | 5 | 2014–2016 |
| QULI FARHAT | 3 | 2015–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 12 | 2014–2020 |
| San Jose, California, US | 8 | 1986–2010 |
| Sunnyvale, California, US | 7 | 1992–2000 |
| Milpitas, California, US | 3 | 2017–2019 |
| Calgary, CA | 2 | 1998–2004 |